Excimer laser with fluoropolymer lining

Details Excimer laser with fluoropolymer lining Excimer laser with fluoropolymer lining

1978-08-17

1982-03-02

Larkins, William D.

Coherent light generators

Particular active media

Gas

2065243, 2065245, 220426, 330 43, 372 61, H01S 303, H01S 3223

Patent

active

043180566

ABSTRACT:
A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.

REFERENCES:
patent: 3135420 (1964-06-01), Farell et al.
patent: 3272373 (1966-09-01), Alleaume et al.
patent: 3921098 (1975-11-01), Hoag
patent: 4105061 (1978-08-01), Tunnicliffe
Loree et al., "Operating Parameters . . . KrF, ArF, and XeF Lasers", 1977 Conf. on Laser Engineering & Applications, Digest of Technical Papers, pp. 62-63, (6-1977).
Morrison & Boyd, Organic Chemistry, 3rd Ed., (Allyn & Bacon, Boston, 1973), p. 1030.
Scientific American, Jun. 1974, pp. 122-126.

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