Coherent light generators – Particular active media – Gas
Patent
1993-07-16
1995-01-31
Healy, Brian
Coherent light generators
Particular active media
Gas
372 31, 372108, 372109, 427554, 427555, 156643, 156668, 2191216, 21912168, 21912169, 2191217, 21912171, H01S 322, B05D 306, B29C 3700, B23K
Patent
active
053864301
ABSTRACT:
An excimer laser ablation processing for forming via holes in a resin film by irradiation of an excimer laser wherein, the emission of light caused during the decomposition of the resin during the processing is detected, its intensity is measured, and the endpoint of the processing is judged or a comparison is made of the positions of light emission and the design positions for processing to examine for the presence of defects. Provision is made of a means for measuring the intensity and a means for judging the endpoint of the processing from the changes in the intensity of light emission during the processing.
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Znotins et al., "Excimer Lasers: An Emerging Technology in Materials Processing," Laser Focus/Electro-Optics, May 1987, pp. 54-71.
Ishizaka, S., "Application of Excimer Laser to Fine Processing," Applied Mechanical Optics, Sep. 1990, pp. 94-99.
Patent Abstracts of Japan, vol. 17, No. 222 (M-1404), May 7, 1993 & JP-A-4 356388 (Fujitsu Ltd), Dec. 10, 1992.
Hashii Hideya
Ishizuki Yoshikatsu
Mizutani Daisuke
Owada Tamotsu
Shimizu Kanae
Fujitsu Limited
Healy Brian
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