Coherent light generators – Particular pumping means – Electrical
Patent
1989-03-09
1990-12-11
Scott, Jr., Leon
Coherent light generators
Particular pumping means
Electrical
372 58, 372 69, 372 33, 372 57, H01S 3097
Patent
active
049775731
ABSTRACT:
An excimer laser including a discharge chamber containing a mixture of halogen, rare gas and buffer gas uses two gas sources to replenish the halogen in the discharge chamber while maintaining the concentrations of all the gases at the optimum levels. One of the gas sources, source A, contains a mixture of the rare gas and the buffer gas in optimum concentrations. The other gas source, source B, contains both the rare gas and the buffer gas, in optimum relative concentrations, and also the halogen, in a concentration which is greater than optimum. As the laser operates and the gain of the laser decreases due to halogen depletion, gas from source B is injected into the discharge chamber to raise the halogen concentration. Gas is then released from the chamber to reduce the chamber pressure to the original level. When halogen replenishment does not suffice to restore the laser gain, due to the build-up of contaminants in the chamber, a portion of chamber gas is released and it is replenished with fresh gas from both sources in proportions adequate to provide optimum concentrations of the various gases.
REFERENCES:
patent: 4429392 (1984-01-01), Yoshida et al.
patent: 4630273 (1986-12-01), Inoue et al.
patent: 4661958 (1987-04-01), Bowes et al.
patent: 4674099 (1987-06-01), Turner
patent: 4722090 (1988-01-01), Haruta et al.
patent: 4794613 (1988-12-01), Nilsen et al.
patent: 4803693 (1989-02-01), Schramm
Bittenson Steven N.
Klauminzer Gary K.
Jr. Leon Scott
Questek, Inc.
LandOfFree
Excimer laser output control device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Excimer laser output control device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Excimer laser output control device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-394032