Coherent light generators – Particular component circuitry – Optical pumping
Patent
1997-12-22
1999-11-09
Healy, Brain
Coherent light generators
Particular component circuitry
Optical pumping
372 37, 372 55, 372 57, H01S 300
Patent
active
059827955
ABSTRACT:
An excimer laser system having a laser chamber containing elongated electrodes and an excimer laser gas and a high voltage pulse power supply having fine digital regulation for supplying high voltage electrical pulses to the electrodes. The high voltage pulse power supply includes a power supply and a magnetic switch circuit for compressing and amplifying the output of the power supply. The power supply includes a silicon controlled rectifier which provides a direct current output to an inverter which converts the output of the silicon controlled rectifier to high frequency alternating current which is in turn amplified by a step up transformer. An output stage diode rectifier in combination with an inductor converts this high frequency high voltage current back to direct current. A control board comprising electronic circuits controls the power supply to provide high voltage pulses at a frequency of at least 1000 Hz. A voltage feedback circuit detects the voltage output of the output stage rectifier and provides a voltage output signal to the control board and a current feedback circuit detects charging current flowing in the output stage diode rectifier and provides a charging current signal to the control board. A digital command control for providing command control to said control board. A preferred embodiment of the present invention achieves very precise regulation with the use of differential instrumentation amplifiers in the feedback circuits and by reducing the charging current near the end of the charging cycle of each pulse.
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Fomenkov Igor V.
Rothweil Daniel A.
Cymer Inc.
Healy Brain
Ross, Esq. John R.
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