Excimer laser equipment

Details Excimer laser equipment Excimer laser equipment

1986-03-12

1988-01-26

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 38, 372 59, 372 60, 372 33, H01S 322

Patent

active

047220902

ABSTRACT:
The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.

REFERENCES:
Johnson et al.; "A Closed-Cycle Gas Recirculating System for Rare-Gas Halide Excimer Lasers"; Appl. Phys. Lett. 32 (5), 1 Mar. '78.

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