Fishing – trapping – and vermin destroying
Patent
1995-08-14
1997-11-18
Kunemund, Robert
Fishing, trapping, and vermin destroying
437174, H01L 21263
Patent
active
056887159
ABSTRACT:
A method uses an excimer laser to activate previously implanted dopant species in the backside of a backside-illuminated CCD or to incorporate dopant ions from a gaseous ambient into the backside of a backside-illuminated CCD and simultaneously activate. The controlled ion implantation of the backside and subsequent thin layer heating by the short wavelength pulsed excimer laser energy activates the dopant and provides for an improved dark current response and improved spectral response. The energy of the pulsed excimer laser is applied uniformly across a backside-illuminated CCD in a very thin layer of the semiconductor substrate (usually silicon) material that requires annealing to uniformly activate the dopant. The very thin layer of the material can be heated to exceedingly high temperatures on a nanosecond time scale while the bulk of the delicate CCD substrate remains at low temperature. Repair of semiconductor dies by effecting a uniform annealing enables salvage and utilization of otherwise discardable components by bringing their dark current response to within an acceptable range.
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Kelley Eugene P.
Reedy Ronald E.
Russell Stephen D.
Sexton Douglas A.
Fendelman Harvey
Keough Thomas Glenn
Kunemund Robert
The United States of America as represented by the Secretary of
Whitesell Eric James
LandOfFree
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