Coherent light generators – Particular active media – Gas
Reexamination Certificate
2006-04-19
2008-05-13
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000, C372S057000, C372S058000
Reexamination Certificate
active
07372887
ABSTRACT:
To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary.The gas supply device and gas exhaust device are controlled so that the laser gas in the laser chamber is partially exchanged in a gas exchange quantity that maintains the quantity of impurities in the laser chamber at or below a fixed level. Also, the gas exchange quantity is obtained using the total quantity of output light energy reduction A, the total gas pressure in the laser chamber P, and output light energy reduction quantity per unit time k, for the case where partial gas exchange is repeated infinitely in the laser chamber.
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Abe Toru
Matsunaga Takashi
Harvey Minsun Oh
Komatsu Ltd.
Nguyen Phillip
Ushio Inc.
Welsh & Katz Ltd.
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