Coherent light generators – Particular active media – Gas
Reexamination Certificate
2006-02-28
2006-02-28
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000, C372S057000
Reexamination Certificate
active
07006548
ABSTRACT:
Burst and spike characteristics in an excimer laser output in a burst operation are efficiently improved. Xenon gas is added from a compact Xe gas cylinder to gases for excimer laser in a chamber supplied from an Ar/Ne gas cylinder and an Ar/F2/Ne gas cylinder, a ratio of the xenon gas is detected by an Xe gas sensor, and the supply of the xenon gas from the Xe gas cylinder to the chamber is controlled by a gas controller.
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Sumitani Akira
Sunaka Eiji
Terashima Katsutomo
Harvey Minsun Oh
Jackson Cornelius H.
Komatsu Ltd.
Posz Law Group , PLC
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