Excimer laser device

Details Excimer laser device Excimer laser device

1991-07-03

1993-02-16

Epps, Georgia Y.

Coherent light generators

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Gas

372 55, 372 87, 372 88, H01S 322

Patent

active

051877163

ABSTRACT:
At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

REFERENCES:
patent: 3653960 (1972-04-01), MacNair
patent: 4017808 (1977-04-01), Fein et al.
patent: 4344905 (1982-08-01), Chilcot
patent: 4817096 (1989-03-01), Nighan et al.
patent: 4860300 (1989-08-01), Baumler et al.
patent: 5043997 (1991-08-01), Morrow et al.
I. E., Kanter et al, Surface Metallization Studies for Excimer Laser Electrodes, Apr. 1979, pp. 119-120.

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