Excimer laser comprising a gas reservoir and a collecting recept

Details Excimer laser comprising a gas reservoir and a collecting recept Excimer laser comprising a gas reservoir and a collecting recept

1993-03-01

1995-03-07

Bovernick, Rodney B.

Coherent light generators

Particular active media

Gas

372 59, 372 60, H01S 322, H01S 3223

Patent

active

053965140

ABSTRACT:
An excimer laser including a gas reservoir in which gas discharge is effected with the participation of halogen gas, comprises a collecting receptacle which communicates both with the gas reservoir and a halogen gas supply through conduits provided with shutoff valves. This apparatus is suitable for carrying out a method of refilling the gas reservoir of the excimer laser with halogen gas even if the pressure of the halogen gas supply is low and its volume restricted.

REFERENCES:
patent: 5005181 (1991-04-01), Yoshioka et al.
patent: 5090020 (1992-02-01), Bedwell
patent: 5199267 (1993-04-01), Mitsui
patent: 5220574 (1993-06-01), Voss et al.

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