Coherent light generators – Particular pumping means – Electrical
Patent
1990-12-05
1992-01-14
Scott, Jr., Leon
Coherent light generators
Particular pumping means
Electrical
372 57, H01S 397
Patent
active
050816381
ABSTRACT:
An excimer laser has a pair of main electrodes defining a lasing space, and a series of pairs of pre-ionization pins arranged alongside the main electrodes. These pins form preionization gaps for generating discharges that provide ultraviolet radiation to condition the gas in the lasing space. The invention consists of providing a tracker of insulating material between each pair of pins to bridge the gap and provide a tracking surface for the pre-ionization discharge.
REFERENCES:
patent: 4365337 (1982-12-01), Cirkel et al.
patent: 4491949 (1985-01-01), Beck et al.
patent: 4498183 (1985-02-01), Levatter
Gallant Glen
Weeks Robert W.
Williams Edward S.
Jr. Leon Scott
Lumonics Inc.
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