Excimer laser

Details Excimer laser Excimer laser

1990-12-05

1992-01-14

Scott, Jr., Leon

Coherent light generators

Particular pumping means

Electrical

372 57, H01S 397

Patent

active

050816381

ABSTRACT:
An excimer laser has a pair of main electrodes defining a lasing space, and a series of pairs of pre-ionization pins arranged alongside the main electrodes. These pins form preionization gaps for generating discharges that provide ultraviolet radiation to condition the gas in the lasing space. The invention consists of providing a tracker of insulating material between each pair of pins to bridge the gap and provide a tracking surface for the pre-ionization discharge.

REFERENCES:
patent: 4365337 (1982-12-01), Cirkel et al.
patent: 4491949 (1985-01-01), Beck et al.
patent: 4498183 (1985-02-01), Levatter

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