Excimer lamps

Details Excimer lamps Excimer lamps

2008-10-09

2010-12-28

Patel, Ashok (Department: 2889)

Electric lamp and discharge devices

With gas or vapor

Envelope with particular structure

C313S113000, C313S607000, C313S234000

Reexamination Certificate

active

07859191

ABSTRACT:
An excimer lamp, including a discharge vessel made of silica glass and having a discharge space; a pair of electrodes disposed on the discharge vessel, wherein the discharge space is filled with xenon gas; and an ultraviolet reflection film made from ultraviolet scattering particles, including silica particles and alumina particles, formed on a surface of the discharge vessel exposed to the discharge space. A thickness Y of the ultraviolet reflection film satisfies the expression Y>4X+5, given that a mean particle diameter of the ultraviolet scattering particles making up the ultraviolet reflection film is X (μm).

REFERENCES:
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patent: 6379024 (2002-04-01), Kogure et al.
patent: 7468145 (2008-12-01), Zukawa et al.
patent: 2007/0057612 (2007-03-01), Hsu et al.
patent: 2008/0143243 (2008-06-01), Auday et al.
patent: 2002-93377 (2002-03-01), None
patent: 3580233 (2004-07-01), None
patent: 2006-139201 (2006-06-01), None
patent: 2007-335350 (2007-12-01), None
patent: 2008-66095 (2008-03-01), None
European Search Report for Application No. EP 08 01 7648 Dated Feb. 26, 2009.

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