Excimer lamp with high pressure fill

Details Excimer lamp with high pressure fill Excimer lamp with high pressure fill

1993-01-27

1996-04-02

Yusko, Donald J.

Electric lamp and discharge devices

With gas or vapor

Having a particular total or partial pressure

313568, 313571, 313572, 315248, 315246, 315 39, 315344, H01J 6112, H01J 6120

Patent

active

055043917

ABSTRACT:
An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.

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