Excimer lamp with high pressure fill

Electric lamp and discharge devices – With gas or vapor – Having a particular total or partial pressure

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

313568, 313571, 313572, 315248, 315246, 315 39, 315344, H01J 6112, H01J 6120

Patent

active

056867930

ABSTRACT:
An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.

REFERENCES:
patent: 3234421 (1966-02-01), Reiling
patent: 3911318 (1975-10-01), Spero et al.
patent: 4143336 (1979-03-01), Searles et al.
patent: 4301425 (1981-11-01), Sze
patent: 4397023 (1983-08-01), Newman et al.
patent: 4427921 (1984-01-01), Proud
patent: 4498029 (1985-02-01), Yoshizawa et al.
patent: 4513424 (1985-04-01), Waymant et al.
patent: 4549109 (1985-10-01), Nighan et al.
patent: 4646311 (1987-02-01), Nighan et al.
patent: 4710679 (1987-12-01), Budinger et al.
patent: 4710939 (1987-12-01), Birnbach et al.
patent: 4802183 (1989-01-01), Harris et al.
patent: 4890292 (1989-12-01), Nishimae et al.
patent: 4942337 (1990-07-01), Beerwald et al.
patent: 4945290 (1990-07-01), Eliasson
patent: 4955035 (1990-09-01), Gekat
patent: 5062116 (1991-10-01), Christensen
patent: 5293403 (1994-03-01), Bashkansky et al.
patent: 5504391 (1996-04-01), Turner et al.
Hiroshi Kumagai and Minoru Obara, "New High-Efficiency Quasi-Continuous Operation of a KrF9B (B X) Excimer Lamp Excited By Microwave Discharge" Appl. Phys. Lett., vol. 54, No. 26, 26 Jun. 1989, 1989 American Institute of Physics, pp. 2619-2621.
Hiroshi Kumagai and Minoru Obara, "Microwave Discharge-Pumped Excimer Lamp", The Review of Laser Engineering, vol. 18, No. 7, Jul. 1990, pp. 456-473.
Ulrich Kogelschatz, "Silent Discharge for the Generation of VU and VUV Excimer RAdiation", 9th International Symposium on Plasma Chemistry, Pugnochiuso, Italy, Sep. 4-8, 1989, pp. 1-8.
Keith Johnson, Roland Pease, John P. Simons and Peter A. Smith, "Competitive Channels in the Interaction of Xe(P) With Cl.sup.2, Br.sub.2 and I.sub.2 ", J. Chem. Soc., Faraday Trans. 2, 1986, 82,1281-1295, pp. 1281-1295.
B. Eliasson and U. Kogelschatz, "UV Excimer Radiation from Dielectric-Barrier Discharges", Appl. Phys. B 46, pp. 299-303 (1988).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Excimer lamp with high pressure fill does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Excimer lamp with high pressure fill, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Excimer lamp with high pressure fill will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1231758

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.