Examination of the physical properties of thin films

Details Examination of the physical properties of thin films Examination of the physical properties of thin films

1990-05-02

1992-08-25

Rosenberger, Richard A.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356369, 385 27, 385 29, 385 31, G01N 2141

Patent

active

051413116

ABSTRACT:
The physical properties of thin films can be examined with the aid of polarized light with which the film to be examined is irradiated while the reflected or transmitted light is deflected in the direction of an imaging system, the polarized light having the effect of exciting waveguide modes in the film to be examined.

REFERENCES:
patent: 4332476 (1982-06-01), Stenberg et al.
patent: 4844613 (1989-07-01), Batchelder et al.
Wei et al., "A new method for determining thin film refractive index and thickness using guided optical waves", Appl. Phys. Lett. 32(12) Jun. 15, 1978.
Surface Plasmon Microscopy, Rothenhausler et al. Nature vol. 332, Apr. 14, 1988.
Integrated Optics and New Wave Phenomena . . . , Tien, Rev. Mod. Phys. vol. 49, No. 2, Apr. 2, 1977.
Modes of Propagating Light Waves in Thin Deposited Semiconductor Films, Applied Physics Letters, vol. 14, No. 9, May 1, 1969.
Thin Grating Couplers for Integrated Optics: . . . , Dalgoutte et al., Applied Optics, vol. 14, No. 12, Dec. 1975.
Handbuch Der Physik, Wolter, S. Flugge, Springer-Verlag, Band XXIV, 1956, pp. 461-554.

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