Examination of surface structure

Details Examination of surface structure Examination of surface structure

1990-03-16

1991-07-02

Evans, F. L.

Optics: measuring and testing

Miscellaneous

356318, 356372, 356376, 356445, G01B 1100

Patent

active

050281321

ABSTRACT:
A technique for examining surface structures which differ in respect of refractive index and/or height modulation of the surface comprises introducing these surface structures into a plasmon surface polariton field and scanning them by means of surface plasmon microscopy.

REFERENCES:
Surface Polaritions-Propagating Electromagnetic . . . , Burstein et al., J. Vac. Sci. Technol., vol. 11, No. 6, Nov./Dec. 1974, 1004-1019.
Physics of Thin Film, Raether, Academic Press, pp. 145-259.
Photoacoustic Observation of Nonradiative Decay . . . , Inagaki et al., Physical Review B, vol. 24, No. 6, Sep. 1981.
On the Decay of Plasmon Surface Polaritons at Smooth . . . , Rothenhausler et al., Surface Science 137 (1984), 373-383.
On the Influence of the Propagation Length of Plasmon . . . , Surface Science 191 (1987), 585-594.
Oberflachenwellen und Brewster fall, . . . , Otto, OPTIK 38 (1973).
Propagation of Surface Polaritons Over Macroscopic . . . Solid State Comm., vol. 12, pp. 185-189, 1973, Pergamon Press, Schoenwald et al.

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