Examination apparatus with multiple image acquisition devices

Optical: systems and elements – Compound lens system – Microscope

Reexamination Certificate

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C359S368000, C359S554000, C250S201800, C250S215000

Reexamination Certificate

active

07864413

ABSTRACT:
An examination apparatus that observes a specimen in a stationary state while suppressing the blurring caused by a control delay. The apparatus includes a first optical system and a second optical system for imaging light produced in a specimen, a first image-acquisition unit with a plurality of first image-acquisition devices for detecting an image formed by the first optical system, a second image-acquisition unit with a second image-acquisition device for acquiring an image formed by the second optical system, and a driving unit that causes the images to be formed at the same position in the second image-acquisition unit. The value obtained by dividing the pixel size Y of the first image-acquisition devices by the magnification X of the first optical system is smaller than the value obtained by dividing the pixel size Y′ of the second image-acquisition device by the magnification X′ of the second optical system.

REFERENCES:
patent: 7126699 (2006-10-01), Wihl et al.
patent: 7232980 (2007-06-01), Oshiro et al.
patent: 7304790 (2007-12-01), Kawano et al.
patent: 7473877 (2009-01-01), Fomitchov
patent: 07253548 (1995-10-01), None

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