Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
Reexamination Certificate
2008-07-23
2011-10-25
Rivell, John (Department: 3753)
Fluid handling
With cleaner, lubrication added to fluid or liquid sealing...
Cleaning or steam sterilizing
C137S266000, C137S565230, C137S565290, C134S021000
Reexamination Certificate
active
08042566
ABSTRACT:
Disclosed herein are devices, methods and systems for ex-situ component recovery. The ex-situ recovery can be performed by desorbing or outgassing components of a processing system in a recovery system, rather than in the processing system itself. The recovery system can include a docking station and/or a heated vacuum chamber. The heated vacuum chamber can be used to desorb or outgas components that will be located inside the processing system, while the docking station can be used to desorb or outgas components that will be connected to the processing system. The processing system components can be placed under pressure by the recovery system to desorb or outgas contaminants and remove virtual leaks. The recovery system pressure can include a vacuum roughing pump, a turbomolecular pump, and/or a cryogenic pump to apply a pressure necessary to desorb or outgas the components.
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Atmel Corporation
Fish & Richardson P.C.
Rivell John
LandOfFree
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