Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1997-03-14
1998-12-15
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
261104, C23C 1600
Patent
active
058490892
ABSTRACT:
Inside a first cylinder for structuring an evaporator, a second cylinder is provided. The second cylinder has an undulated surface and a plurality of fine holes are provided on this surface. A liquid TEOS is contained in a first space positioned between the first cylinder and the second cylinder, and a second space positioned inside the second cylinder is filled with a gas TEOS evaporated from the fine holes. The pressure of the gas TEOS is set to be almost equal to the pressure of the liquid TEOS.
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Okumura Katsuya
Tsunashima Yoshitaka
Bueker Richard
Kabushiki Kaisha Toshiba
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