Evaporator feed

Patent

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Details

H01J 37305

Patent

active

042621607

ABSTRACT:
Apparatus and method for supplying feedstock to a reservoir containing material having a portion which is heated to a molten condition and vaporized by an electron beam. The electron beam is supplied from a heated filament and directed to impact on the vapor source material by electric and magnetic fields. The feedstock is suspended above a portion of the reservoir out of the path of the electron beam. Skip electrons along with some secondary electrons emitted from the surface of the material in the vicinity of the region of electron beam impact, together with radiant heating therefrom, are utilized to melt an exposed portion of the feedstock, allowing it to drip into the reservoir, and replenish the supply of material which is depleted by vaporization. Vaporization is maintained substantially uniform from the region of electron beam impact and splatter of the feedstock is largely avoided.

REFERENCES:
patent: 4035574 (1977-07-01), Kennedy

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