Evaporator device for the evaporation of several materials

Details Evaporator device for the evaporation of several materials Evaporator device for the evaporation of several materials

1985-09-05

1986-12-30

Pianalto, Bernard D.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118730, 219121EE, 219121EX, 219271, 219275, 427 42, 427250, C23C 1600

Patent

active

046320598

ABSTRACT:
An evaporator device system having an electron jet heating device for the vaporization of several materials onto a substrate in a vacuum chamber includes at least two crucibles for the reception of respective evaporation materials. These crucibles are concentrically arranged on a turntable. For the more uniform evaporation of the material, at least the crucible aligned with the electron jet is caused to rotate in the turntable during operation of the eletron jet heating device.

REFERENCES:
patent: 2482329 (1949-09-01), Dimmick
patent: 3227133 (1966-01-01), Anderson et al.
patent: 3625180 (1971-12-01), Smith et al.
patent: 3684557 (1972-08-01), Kienel
patent: 3695217 (1972-10-01), Jacobsson
patent: 3801356 (1974-04-01), Mulfinger et al.
patent: 4048462 (1977-09-01), Hill et al.
patent: 4108107 (1978-08-01), Scheuermann

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