Evaporator crucible and improved method for performing electron-

Details Evaporator crucible and improved method for performing electron- Evaporator crucible and improved method for performing electron-

1997-07-31

1999-03-02

Hoang, Tu Ba

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

373 15, 219420, H01J 37305

Patent

active

058780742

ABSTRACT:
A crucible is disclosed for use in coating a substrate with deposition materials by electron-beam evaporation. The crucible is configured to be inserted into an evaporator pot; it has a bottom and at least one sidewall extending upwardly from the bottom and terminating in a rim, such that the bottom and sidewall define a reservoir for containing the deposition material, and the rim defines a mouth out of which the deposition material may evaporate. A lip extends upwardly from a predetermined section of the rim which shields the spattering of deposition of material onto the evaporator pot during the evaporation process. A improved method is also disclosed for performing electron-beam evaporation with the present invention crucible.

REFERENCES:
patent: 2635579 (1953-04-01), Chadsey, Jr.
patent: 3364296 (1968-01-01), Smith, Jr.
patent: 3879022 (1975-04-01), Aichert
patent: 4131753 (1978-12-01), Tsujimoto et al.
patent: 4641764 (1987-02-01), Faulkner, III
patent: 5139236 (1992-08-01), Mankins

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