Evaporator cell for vacuum deposition on substrates

Details Evaporator cell for vacuum deposition on substrates Evaporator cell for vacuum deposition on substrates

1984-07-30

1986-01-21

Morgenstern, Norman

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118733, 219275, C23C 312

Patent

active

045651582

ABSTRACT:
An evaporator cell for vacuum deposition on substrates comprises a cell housing which has one end with a vapor escape opening and an opposite end into which is positionable a plug member which is moved in the housing so that its closed end be positioned in a position closing the vapor escape opening or away therefrom into various opening positions for regulating the amount of vapor which escapes during the vapor deposition. The plug is advantageously a closed tubular member which contains a heating element therein and is advantageously moved by means of a plunger which is mounted in a wall of the evaporator so as to be sealed.

REFERENCES:
patent: 4061800 (1977-12-01), Anderson
patent: 4401052 (1983-08-01), Boron et al.
Budo et al., "Extended Virtual Evaporation Source and Deposition Device", IBM Tech. Disclosure Bulletin, vol. 19, No. 8, Jan. 1977, pp. 2826-2827.

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