Evaporator boat for an apparatus for coating substrates

Details Evaporator boat for an apparatus for coating substrates Evaporator boat for an apparatus for coating substrates

1997-02-21

1998-08-04

Edwards, Laura

Coating apparatus

With vacuum or fluid pressure chamber

118726, 373118, 392389, C23C 1400

Patent

active

057887691

ABSTRACT:
A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part (8) being provided with openings (12) for reducing cross sectional area where increased ohmic heating is desired, such as near the clamping points and between individual areas where wire is fed for melting in the trough.

REFERENCES:
patent: 2615060 (1952-10-01), Marinace et al.
patent: 3020177 (1962-02-01), Alexander
patent: 3636305 (1972-01-01), Passmore
patent: 4036167 (1977-07-01), Lu
patent: 5179622 (1993-01-01), Kleyer
patent: 5198032 (1993-03-01), Kleyer et al.
patent: 5242500 (1993-09-01), Elvers et al.
patent: 5261964 (1993-11-01), Grimm
patent: 5495550 (1996-02-01), Mariner et al.
J.F. Cosgrove and R.J. Eschbach, "Titanium Evaporation Source", IBM Technical Disclosure Bulletin, vol. 27, No. 1A (Jun. 1984).

Affiliated with

Also associated with

Rating

Evaporator boat for an apparatus for coating substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Evaporator boat for an apparatus for coating substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evaporator boat for an apparatus for coating substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1173039