Evaporator boat for an apparatus for coating substrates

Details Evaporator boat for an apparatus for coating substrates Evaporator boat for an apparatus for coating substrates

1992-04-02

1993-11-16

Hearn, Brian E.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

373118, 392389, C23C 1400, C23C 1426

Patent

active

052619648

ABSTRACT:
An evaporator boat for an apparatus for coating substrates in a vacuum coating chamber consists of a shallow, trough-shaped piece of an electrically conductive material, the boat being heated by direct passage of current through it. The evaporator boat has an elongate hexagonal plan, the configuration of the recess within the boat for containing the material to be evaporated corresponding approximately to that of the boat. Lengthwise opposed ends of the evaporator boat are provided each with an approximately rectangular, perpendicular flat area. The flat areas together form two directly opposed parallel clamping surfaces of the evaporator boat so that when the evaporator boat is heated, two active evaporating zones form on both sides of the point of contact between the delivered wire and the evaporator boat.

REFERENCES:
patent: 3210525 (1965-10-01), Liben
patent: 3231846 (1966-01-01), Radke
patent: 3598958 (1971-08-01), Davey et al.
patent: 3637980 (1971-01-01), Fox et al.
patent: 3930463 (1976-01-01), Bickerdike et al.
Webster's II New Riverside University Dictionary, p. 1008.

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