Gas and liquid contact apparatus – With external supply or removal of heat – Temperature or humidity sensor
Reexamination Certificate
2007-06-13
2011-11-01
Bushey, Charles (Department: 1776)
Gas and liquid contact apparatus
With external supply or removal of heat
Temperature or humidity sensor
C261S135000, C261S039100, C261S065000, C261S121100
Reexamination Certificate
active
08047510
ABSTRACT:
An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0to regulate the cross-sectional area of the passage through which the mixed gas G0is distributed so as to hold the pressure of the mixed gas G0inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0is supplied to a process chamber while controlling the pressure inside the source tank.
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International Search Report issued in corresponding application PCT/JP2007/000623, completed Sep. 5, 2007 and mailed Sep. 18, 2007.
Dohi Ryousuke
Hidaka Atsushi
Hirata Kaoru
Ikeda Nobukazu
Matsumoto Atsushi
Bushey Charles
Fujikin Incorporated
Griffin & Szipl, P.C.
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