Evaporation source for vacuum deposition

Details Evaporation source for vacuum deposition Evaporation source for vacuum deposition

1977-05-17

1978-09-12

Envall, Jr., R. N.

Electric heating

Microwave heating

Tunnel furnace

219275, 219424, H05B 310

Patent

active

041139780

ABSTRACT:
Evaporation source for vacuum deposition, comprising a refractory crucible provided in its outer surface with conducting members traversed by an electric current and able to raise the crucible temperature by Joule effect, in which the said outer surface is coated, prior to fitting the conducting members, with a thin intermediate coating layer which does not react with the crucible but which is in intimate contact with the latter.
A particular application is the vacuum heating to elevated temperature of crucibles.

REFERENCES:
patent: 3430937 (1969-03-01), Spitzer
patent: 3514575 (1970-05-01), Hall et al.

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