Evaporation source

Details Evaporation source Evaporation source

1975-08-13

1977-01-11

Albritton, C. L.

Electric heating

Heating devices

Resistive element: igniter type

21119, A61L 300

Patent

active

040028801

ABSTRACT:
In an evaporation source for the vacuum deposition of sublimating material, the evaporant surrounds, and is spaced from, an axially disposed coiled tungsten heater. The evaporated material passes out of the source in an upward direction to deposit on a substrate located above the source.

REFERENCES:
patent: 2435997 (1948-02-01), Bennett
patent: 2975075 (1961-03-01), Beese
patent: 3244857 (1966-04-01), Bertelsen et al.
patent: 3872280 (1975-03-01), Van Dalen

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