Evaporation of high Tc Y-Ba-Cu-O superconducting thin film on Si

Details Evaporation of high Tc Y-Ba-Cu-O superconducting thin film on Si Evaporation of high Tc Y-Ba-Cu-O superconducting thin film on Si

1988-05-09

1989-11-21

Morganstern, Norman

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

427 62, 427 63, 4271263, 4272553, 428697, 428701, B05D 512, C23C 1408, C23C 1424

Patent

active

048823120

ABSTRACT:
A superconducting thin film of YBaCuO having a zero resistance transition temperature of at least about 38K is deposited by evaporation on a silicon-containing substrate with a zirconia buffer layer between the film and the substrate.

REFERENCES:
patent: 4395813 (1983-08-01), Roth et al.
Lee et al., "Microprobe Characterization of Sputtered High Tc Superconducting Films on Silicon", AIP Conf. Proc. No. 165 P. 427 (1988).
Naito et al., "High-Tc Superconductors-Thin-Film Synthesis of the High-Tc Oxide Superconductor YBa.sub.2 Cu.sub.3 O.sub.7 by Electron-Beam Codeposition", J. Mater. Res. 2(6), p. 713, 1987.
Qiu et al., "Y-Ba-Cu-O thin films prepared by a multilayer vacuum method", Appl Phys. Lett. 52(7), p. 587, 1988.
Chien et al., "Effect of noble metal buffer layers on superconducting YBa.sub.2 Cu.sub.3 O.sub.7 thin films", Appl. Phys. Lett. 51(25), p. 2155 (1987).
Ovshinsky et al., "Superconductivity at 155 K", Physical Review Letters, vol. 58, No. 24, p. 2579 (1987).
Politis et al., "Preparation and superconducting properties of La.sub.1.8 Sr.sub.0.2 CuO.sub.4 and YBa.sub.2 Cu.sub.3 O.sub.6.5 ", MRS edited by Gubser et al., Proc. Sym. Extended Abstracts, p. 141 (1987).
Hammond et al., "Superconducting films of the Perovskite superconductors by electron-beam deposition", MRS Extended Abstract edited by Gubser et al., p. 169 (1987), Apr. 23.
Lee et al., "Microprobe Characterization of Sputtered High Tc Superconducting Films on Silicon", AIP No. 165 (Anaheim, CA), Nov. 1987, pp. 427-434.
Naito et al., "Thin-Film Synthesis of the High-Tc Oxide Superconductor YBa.sub.2 Cu.sub.3 O.sub.7 by Electron-Beam Codeposition", J. Mater. Res. 2(6), Nov./Dec. 1987, pp. 713-725.
Mankiewich et al., "High critical-current density Ba.sub.2 YCU.sub.3 O.sub.7 thin films produced by coevaporation of Y, Cu, and BaF.sub.2 ", MRS, vol. 99, Nov. 1987, (Boston, MA), pp. 119-125.
"High-T.sub.C Superconductors-Thin-Film Synthesis of the High-T.sub.c Oxide Superconductor Yba.sub.2 Cu.sub.3 O.sub.7 by Electron-Beam Codeposition", M. Naito et al., J. Mater. Res. 2(6), Nov./Dec. 1987.
Abstract-American Vacuum Society-Nov. 2-6, 1987-"Microprobe Characterization of Sputtered High T.sub.c Superconducting Films on Si and SiTiO.sub.3 ", S. Y. Lee et al.
"Thin Films of Y-Ba-Cu-O" on Silicon and Silicon Dioxide, A. Mogro-Campero and L. G. Turner, Jan. 1988.
"Superconducting Y-Ba-Cu-O Thin Films By Evaporation", A. Mogro-Campero et al., High Temperature Superconductors II, Materials Research Society, Apr. 5, 1988.
"Microprobe Characterization of Sputtered High T.sub.c Superconducting Films on Silicon", S. Y. Lee et al., American Institute of Physics, Apr. 1988.

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