Evaporation method and manufacturing method of display device

Details Evaporation method and manufacturing method of display device Evaporation method and manufacturing method of display device

2005-02-08

2005-02-08

Cleveland, Michael (Department: 1762)

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

C427S066000, C427S068000, C427S069000, C427S070000, C427S248100, C427S255600, C427S282000, C118S721000

Reexamination Certificate

active

06852356

ABSTRACT:
A glass substrate and a shadow mask are put tightly together by inserting the glass substrate between a magnet and the shadow mask made of magnetic material. A pattern forming of an organic EL device is performed by depositing an organic EL material on the surface of the glass substrate from an evaporation source through an opening portion in the shadow mask. A coarsening processing has been performed on the surface of shadow mask facing the glass substrate. This suppresses the damage on the substrate surface by the shadow mask during the evaporation processing.

REFERENCES:
patent: 6251472 (2001-06-01), Ohashi
patent: 6280821 (2001-08-01), Kadunce et al.
patent: 6373135 (2002-04-01), Weber
patent: 6469439 (2002-10-01), Himeshima et al.
patent: 20040142625 (2004-07-01), Freeman et al.

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