Evaporation apparatus

Details Evaporation apparatus Evaporation apparatus

2005-06-28

2005-06-28

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C392S389000

Reexamination Certificate

active

06911094

ABSTRACT:
An evaporation apparatus comprises an elongated crucible having an upper opening and storing an evaporation material, an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating the evaporation material stored in the crucible, and has an opening through which the evaporation material which is vaporized by heating can pass through, and a fixing member for pressing and fixing the electric heater onto the elongated crucible. Further, between the fixing member and the electric heater, an angle member having surface portions respectively fitting onto an edge portion of the upper surface and an upper portion of the side surface of the elongated crucible is provided along the longitudinal direction of the elongated crucible. A pressing force from the fixing member is made to exert onto the electric heater via the angle member to bring the electric heater into close contact with the elongated crucible.

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patent: 2003/0085227 (2003-05-01), Azzarello
patent: 2003/0101937 (2003-06-01), Van Slyke et al.
patent: 2001-247959 (2001-09-01), None

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