Evaluation unit of a differential-pressure sensor

Details Evaluation unit of a differential-pressure sensor Evaluation unit of a differential-pressure sensor

1997-07-29

1999-10-19

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73708, 3612834, G01L 912

Patent

active

059692588

ABSTRACT:
Evaluation unit of a differential-pressure sensor An evaluation unit of a differential-pressure sensor is provided which supplies an output signal which corresponds to a differential pressure (.DELTA.P) which has been corrected with respect to a measuring error due to the static pressure (P.sub.S). The differential-pressure sensor has a capacitive single-chamber differential-pressure measuring cell with two capacitors (4, 5) as sensor element (1), and a temperature sensor (6) is arranged at the sensor element (1). The differential-pressure measured value is corrected by means of a first correction value (.DELTA.K) which is a measure of the static pressure (P.sub.S) at a reference temperature (T.sub.R). This correction value (.DELTA.K) is determined from the difference between a sensor temperature (T.sub.S) determined by means of the temperature sensor (6) and a sum of a temperature discrepancy (T.sub.0) and an internal temperature (T.sub.i) assigned to the sum (.SIGMA.) of the reciprocal values of the capacitances of the two capacitors (4, 5).

REFERENCES:
patent: 5000048 (1991-03-01), Kordts
patent: 5012677 (1991-05-01), Shimada et al.
patent: 5097712 (1992-03-01), Gerst et al.
patent: 5111698 (1992-05-01), Banholzer et al.
Kirberish, L., "A Smart Transmitter for Differential Pressure Measurement," Journal A, vol. 32, No. 3, Oct. 1991, pp. 35-37.

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