Evaluation of surface and subsurface characteristics of a sample

Details Evaluation of surface and subsurface characteristics of a sample Evaluation of surface and subsurface characteristics of a sample

1985-04-30

1986-12-30

LaRoche, Eugene R.

Optics: measuring and testing

For light transmission or absorption

356446, 374 5, 374 57, G01N 2147

Patent

active

046325611

ABSTRACT:
A method and apparatus is disclosed for evaluating surface and subsurface features in a sample by detecting scattering of a probe beam. More particularly, the subject invention relates to the detection of thermal and/or plasma waves through the phenomenon of optical scattering. The apparatus includes a periodic excitation source for supplying energy to the surface of the sample to generate thermal and/or plasma waves. A radiation probe is directed to the surface of the sample within the area that is being periodically excited and in a manner that the probe beam is scattered from the excited area. Variations of the intensity of the scattered probe beam are detected and processed to evaluate surface and subsurface characteristics of the sample.

REFERENCES:
patent: 4243329 (1981-01-01), Frosch et al.
patent: 4255971 (1981-03-01), Rosencwaig
patent: 4284356 (1981-08-01), Heitman
patent: 4513384 (1985-04-01), Rosencwaig
patent: 4521118 (1985-06-01), Rosencwaig
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4579463 (1986-04-01), Rosencwaig et al.

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