Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2009-05-15
2010-12-28
Vanore, David A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C355S053000, C355S077000, C353S122000
Reexamination Certificate
active
07858958
ABSTRACT:
A fabrication method of an optical element having a multilayer film includes the steps of forming a multilayer film on a substrate, measuring a secondary radiation radiated from the multilayer film when a light with a wavelength of 2 to 40 nm is irradiated to the multilayer film, determining a phase difference between the light irradiated to the multilayer film and the light reflected from the multilayer film based on a measurement result of the measuring step, and modifying the multilayer film based on the determined phase difference.
REFERENCES:
patent: 6355381 (2002-03-01), Yan et al.
patent: 6479195 (2002-11-01), Kirchauer et al.
patent: 6607862 (2003-08-01), Yan et al.
patent: 6610447 (2003-08-01), Yan et al.
patent: 6756163 (2004-06-01), Yan
patent: 7083290 (2006-08-01), Masaki et al.
patent: 7280184 (2007-10-01), Hasegawa et al.
patent: 2002/0044287 (2002-04-01), Otaki
patent: 2003/0081722 (2003-05-01), Kandaka et al.
patent: 2000-55841 (2000-02-01), None
patent: 2000-097620 (2000-04-01), None
patent: 2002-243669 (2002-08-01), None
M. Malinowski et al.; “Controlling Contamination in Mo/Si Multiplayer Mirrors by Si Surface-capping Modifications” , Proceedings of SPIE; vol. 4688; (Jul. 2002); pp. 442-453.
M. Yamamoto; “SUB-nm Figure Error Correction of an EUV Multilayer Mirror by its Surface Milling”; Nuclear Instruments and Method in Physics Research A.; (2001) pp. 1282-1285.
Y. Nakai et al. “Stopping Power of Matter for Electrons Below 10kV”; Applied Physics; vol. 51, Section 3; (Mar. 1982); pp. 279-282; with English translation (8 pages).
J.H. Underwood et al.; “Layered Synthetic Microstructures as Bragg Diffractors for X-rays and Extreme Ultraviolet: Theory and Predicted Performance”; Applied Optics; vol. 20, No. 17; (Sep. 1, 1981); pp. 3027-3034.
Miyachi Takeshi
Miyake Akira
Canon Kabushiki Kaisha
Rossi Kimms & McDowell LLP
Vanore David A
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