Evaluation device for evaluating semiconductor device

Details Evaluation device for evaluating semiconductor device Evaluation device for evaluating semiconductor device

2005-08-09

2005-08-09

Thai, Luan (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

06927594

ABSTRACT:
An evaluation device for evaluating a semiconductor device, used for evaluating electric characteristics of an electrical connection member provided in a vertical direction to a substrate surface, includes a unit circuit having a switching transistor in which a gate thereof connected to a signal line and one of a source and a drain thereof is connected to a first interconnect, and a first resistance element in which one terminal is connected to the other one of the source and the drain of the switching transistor and the other terminal is connected to a second interconnect. The first resistance element constituting each unit circuit includes at least one electrical connection member.

REFERENCES:
patent: 6041428 (2000-03-01), Pelagalli et al.
patent: 6437633 (2002-08-01), Muellner
patent: 7-106385 (1995-04-01), None
patent: 26-30219 (1997-04-01), None

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