Evaluating pattern for measuring an erosion of a...

Details Evaluating pattern for measuring an erosion of a... Evaluating pattern for measuring an erosion of a...

2005-07-26

2005-07-26

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S071200, C324S699000, C324S700000, C257S752000, C438S008000

Reexamination Certificate

active

06922070

ABSTRACT:
An evaluating pattern includes a conductive pattern formed on a substrate, an insulating layer which is formed on the conductive pattern, a plurality of contact holes formed in a rectangular area through the insulating layer, and a conductive material filled into the contact holes to the conductive pattern.

REFERENCES:
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patent: 5890951 (1999-04-01), Vu
patent: 6020644 (2000-02-01), Tanigawa
patent: 6228771 (2001-05-01), Allers
patent: 6480017 (2002-11-01), Narita
patent: 6774660 (2004-08-01), Narita
patent: 2002/0125905 (2002-09-01), Borden et al.
patent: 2000-021882 (2000-01-01), None
patent: 2000-058611 (2000-02-01), None

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