Evacuation system and method therefor

Details Evacuation system and method therefor Evacuation system and method therefor

1992-04-24

1993-11-09

Bertsch, Richard A.

Pumps

Diverse pumps

Including rotary nonexpansible chamber type

417901, 417205, 62 555, 62100, 55269, F04B 2314, F04B 3708, B01D 800

Patent

active

052597350

ABSTRACT:
An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased.

REFERENCES:
patent: 3392538 (1968-07-01), Mongodin
patent: 3536418 (1970-10-01), Breaux
patent: 4089185 (1978-05-01), Kemmer et al.
patent: 4551197 (1985-10-01), Guilmette
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4722191 (1988-02-01), Waltrich et al.
patent: 4757689 (1988-07-01), Bachler

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