Pumps – Successive stages
Reexamination Certificate
2011-03-29
2011-03-29
Freay, Charles G (Department: 3746)
Pumps
Successive stages
C417S423400, C118S715000
Reexamination Certificate
active
07914265
ABSTRACT:
A system for evacuating an enclosure is provided. The system includes a first vacuum pump having an inlet selectively connectable to an outlet from the enclosure. A second vacuum pump is also provided together with a conduit for connecting an exhaust of the first vacuum pump to an inlet of the second vacuum pump. An auxiliary chamber is provided, this chamber being selectively connectable to the conduit such that, in a first state, gas can be drawn from the auxiliary chamber by the second vacuum pump in isolation from the enclosure, and, in a second state, gas can be drawn from the enclosure to the auxiliary chamber through the first vacuum pump.
REFERENCES:
patent: 4850806 (1989-07-01), Morgan et al.
patent: 4887941 (1989-12-01), Crinquette et al.
patent: 5039280 (1991-08-01), Saulgeot et al.
patent: 5165864 (1992-11-01), Burger et al.
patent: 5575853 (1996-11-01), Arami et al.
patent: 5595477 (1997-01-01), Amlinger
patent: 6056510 (2000-05-01), Miura et al.
patent: 6446651 (2002-09-01), Abbel
patent: 2002/0131870 (2002-09-01), Puech
patent: 2003/0068233 (2003-04-01), Royce et al.
patent: 2004/0136835 (2004-07-01), Bez et al.
patent: 2004/0146410 (2004-07-01), Conrad et al.
patent: 2004/0191079 (2004-09-01), Ohmi et al.
patent: 2005/0129509 (2005-06-01), Jostlein
patent: 2006/0182638 (2006-08-01), Ohmi
patent: 118 144 (1976-02-01), None
patent: 4-141936 (1992-05-01), None
Reissmueller Lothar, Huebner Dietrich; Abstract of Patent No. DD118144 A1, “Gas Container Quick Evacuation Method—Uses Two Control Valves and Time Programme,” Feb. 12, 1976.
Yoshimura Nagamitsu, Hirano Haruo; Abstract of Patent No. JP 4141936 A, “Evacuation Device,” May 15, 1992; Jeol Ltd.
Niimura Yoshihiro; Abstract of Patent Application JP 11230034, “Evacuating System and Its Operating Method,” Ebara Corp; Aug. 24, 1999.
United Kingdom Search Report of Application No. GB 0418771.2; dated Nov. 26, 2004; Claims searched: 1-13; Date of search: Nov. 25, 2004.
United Kingdom Search Report of Application No. GB 0418771.2; Claims searched: 14-24; Date of search: Feb. 11, 2005.
PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration of International Application No. PCT/GB2005/003221; Date of mailing: Dec. 6, 2005.
PCT International Search Report of International Application No. PCT/GB2005/003221; Date of mailing of the International Search Report: Dec. 6, 2005.
PCT Written Opinion of the International Searching Authority of International Application No. PCT/GB2005/003221; Date of mailing: Dec. 6, 2005.
Clayton Patrick Brian
Coles Stuart Charles
Galtry Michael Andrew
Turrell David Alan
Edwards Limited
Freay Charles G
Jacobs Todd D
LandOfFree
Evacuation of a load lock enclosure does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Evacuation of a load lock enclosure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evacuation of a load lock enclosure will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2687166