Refrigeration – Low pressure cold trap process and apparatus
Patent
1990-05-04
1991-11-05
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 415 90, 417901, B01D 800
Patent
active
050622714
ABSTRACT:
An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.
The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run. During regeneration, the gate valve is closed, the turbomolecular pump is run, and the heat exchanger is heated by means of a heater or by operation of the helium refrigator being suspended, thereby sublimating molecules freeze-trapped in the heat exchanger.
REFERENCES:
patent: 3536418 (1970-10-01), Breaux
patent: 3625019 (1971-12-01), Osterstrom
patent: 4277951 (1981-07-01), Longsworth
patent: 4597267 (1986-07-01), Forrest
patent: 4860546 (1989-08-01), Harvell et al.
Patent Abstracts of Japan No. 62074075, Sep. 4, 1987.
Kuriyama Fumio
Murai Yukio
Okumura Katsuya
Sobukawa Hiroshi
Tsujimura Manabu
Capossela Ronald C.
Ebara Corporation
Kabushiki Kaisha Toshiba
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