Evacuating device

Details Evacuating device Evacuating device

2007-09-04

2007-09-04

Look, Edward K. (Department: 3745)

Rotary kinetic fluid motors or pumps

With means for re-entry of working fluid to blade set

Turbine regenerative pump

C415S056200, C415S073000, C415S090000

Reexamination Certificate

active

10517113

ABSTRACT:
A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

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