Evacuating apparatus having interengaging rotors with threads ha

Details Evacuating apparatus having interengaging rotors with threads ha Evacuating apparatus having interengaging rotors with threads ha

1997-09-29

1999-09-14

Freay, Charles G.

Pumps

Motor driven

Electric or magnetic motor

418 9, 4182013, F01C 116

Patent

active

059512660

ABSTRACT:
An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.

REFERENCES:
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patent: 5295798 (1994-03-01), Maruyama et al.
patent: 5374173 (1994-12-01), Maruyama et al.
patent: 5533887 (1996-07-01), Maruyama et al.
patent: 5674063 (1997-10-01), Ozaki et al.

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