Evacuating apparatus

Details Evacuating apparatus Evacuating apparatus

1995-06-06

1998-01-20

Freay, Charles G.

Pumps

Motor driven

Electric or magnetic motor

417 42, 417 45, 418 9, 4182011, F04B 3504

Patent

active

057095370

ABSTRACT:
An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.

REFERENCES:
patent: 3515164 (1970-06-01), Dunnous
patent: 3807911 (1974-04-01), Caffrey
patent: 4068984 (1978-01-01), Spindler
patent: 4504201 (1985-03-01), Wycliffe
patent: 4792294 (1988-12-01), Mowli
patent: 5040949 (1991-08-01), Crinquette et al.
patent: 5197861 (1993-03-01), Maruyama et al.
patent: 5295798 (1994-03-01), Maruyama et al.
patent: 5374173 (1994-12-01), Maruyama et al.

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