Evacuated wafer container

Details Evacuated wafer container Evacuated wafer container

1991-12-20

1993-10-26

Fidei, David T.

Special receptacle or package

For a vehicle

206454, 2065248, 141 65, 141 98, B65D 8548

Patent

active

052557839

ABSTRACT:
A container and a method of storing semiconductor wafers, wherein a closed container has sealed top and bottom portions of molded plastic material and uniquely adapted for storing semiconductor wafers, the container having, in one of its parts, a gas receiving stem and valve for removing a portion of the gaseous atmosphere within the container as to store the semiconductor wafers in a partial vacuum, one portion of the container may incorporate a thin wall of the molded container comprising a flexible membrane adjacent edges of the semiconductor wafers to be drawn against the wafers and hold them in place within the container; the walls of the closed container being covered with a diamond-like coating; and a method of storing semiconductor wafers by confining the wafers in a multipart container, sealing the container, and modifying the atmosphere within the container as by reducing the gas pressure within the container, changing the gaseous atmosphere in the container by, in some cases, substituting an inert gas for the air within the container, and relieving the vacuum pressure within the container as the container is to be opened, by supplying clean air into the container with minimial particulate.

REFERENCES:
patent: 4061228 (1977-12-01), Johnson
patent: 4434891 (1983-03-01), Skinner et al.
patent: 4577650 (1986-03-01), McConnell
patent: 4684021 (1987-08-01), Neibling et al.
patent: 4718549 (1988-01-01), Rissotti et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4966519 (1990-10-01), Davis et al.
patent: 5024329 (1991-06-01), Grohrock
patent: 5054418 (1991-10-01), Thompson et al.
Gunawardena et al, "SMIF and its Impact on Cleanroom Automation", Microcontamination, Sep. 1985.
Geany, et al, "Self-Sealing Shake-Proof Wafer Carrier", IBM Technical Disclosure Bulletin, vol. 9, No. 6, Nov., 1976, pp. 2069 and 2070.

Affiliated with

Also associated with

Rating

Evacuated wafer container does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Evacuated wafer container, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evacuated wafer container will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-952919