Glass manufacturing – Processes – With shaping of particulate material and subsequent fusing...
Reexamination Certificate
2006-02-14
2006-02-14
Vincent, Sean (Department: 1731)
Glass manufacturing
Processes
With shaping of particulate material and subsequent fusing...
C065S017300, C065S183000, C065S401000
Reexamination Certificate
active
06997015
ABSTRACT:
The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as mirrors and platen stage structures that can be used, for example, in EUV lithography. The method includes forming a mixture of silica soot, binder, lubricant and solvent. The homogenized mixture is then extruded through a slit die or mask into a flat planar pre-form, and the extruded pre-form is then consolidated by heating into a substantially full density, substantially striae-free lithography glass substrate structure. The consolidated perform has a substantially uniform coefficient of thermal expansion and is also substantially void free.
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Bishop Seann
Bowden Bradley F.
Hrdina Kenneth E.
Wight, Jr. John F.
Corning Incorporated
Douglas Walter M.
Vincent Sean
LandOfFree
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