EUV light spectrum measuring apparatus and calculating...

Details EUV light spectrum measuring apparatus and calculating... EUV light spectrum measuring apparatus and calculating...

2007-03-13

2007-03-13

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

11062026

ABSTRACT:
A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.

REFERENCES:
patent: 4979203 (1990-12-01), Suckewer et al.
patent: 6324256 (2001-11-01), McGregor et al.
patent: 7003075 (2006-02-01), Miyake et al.
patent: 2004/0129900 (2004-07-01), Den Boef et al.
patent: 10-73698 (1998-03-01), None
patent: 2002-174700 (2002-06-01), None

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