Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-02-20
2007-02-20
Berman, Jack (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
Reexamination Certificate
active
11238828
ABSTRACT:
An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials created in an EUV light-creating plasma; a replacement material generator positioned to deliver replacement material comprising the capping material to the collector outer surface at a rate sufficient to replace the capping material removed due to the removing interaction. The replacement material generator may comprise a plurality of replacement material generators positioned to respectively deliver replacement material to a selected portion of the collector outer surface, which may comprise a sputtering mechanism sputtering replacement capping material onto the collector outer surface.
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Ershov Alexander I.
Fomenkov Igor V.
Partlo William N.
Berman Jack
Cray William
Cymer Inc.
Yantorno Jennifer
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