EUV light source

Details EUV light source EUV light source

2006-12-27

2008-08-12

Nguyen, Kiet T (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C378S119000

Reexamination Certificate

active

07411203

ABSTRACT:
An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprising a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a ibeus defining a desired plasma initiation site, comprising; a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, wherein the target stream track results from the imaging speed of the camera being too slow to image individual plasma formation targets forming the target stream imaged as the target stream track; a stream track error detector detecting an error in the position of the target stream track in at least one axis genemily perpendicular to the target stream track from a desired stream truck intersecting the desired plasma initiation site.

REFERENCES:
patent: 5016265 (1991-05-01), Hoover
patent: 6504903 (2003-01-01), Kondo et al.
patent: 7067832 (2006-06-01), Mizoguchi et al.
patent: 7091507 (2006-08-01), Masaki et al.
patent: 2006/0011870 (2006-01-01), Yamamoto et al.

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