EUV energy detection

Details EUV energy detection EUV energy detection

2006-12-26

2006-12-26

Gabor, Otilia (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

C250S336100

Reexamination Certificate

active

07154101

ABSTRACT:
A detector for extreme ultraviolet (EUV) energy uses incidence reflectance of the EUV beam off the detector to both capture a small but controllable fraction of the EUV energy and to redirect most of the energy to its target. In one embodiment, a reflective coating of material on a sensor surface is used. In another embodiment, a multi-layer reflector on a sensor is used. A method of making the multi-layer reflector/sensor is also described.

REFERENCES:
patent: 4032783 (1977-06-01), Koda
patent: 4691104 (1987-09-01), Murata et al.
patent: 6377655 (2002-04-01), Murakami et al.
patent: 6710351 (2004-03-01), Berger
patent: 2003/0231415 (2003-12-01), Puerto

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