Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2007-01-02
2007-01-02
Toledo, Fernando L. (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C438S029000, C372S064000
Reexamination Certificate
active
10707854
ABSTRACT:
A planar photonic bandgap structure includes a substrate and a suspended membrane with holes. A waveguiding film is applied directly on and registered with the membrane so as to avoid the holes. The film has an index of refraction which is higher than an index of refraction of the membrane to allow a waveguiding function to occur within the film. A method of forming a planar photonic bandgap structure includes applying first and second films on a substrate and exposing a pattern of a plurality of holes on the second film. The exposed pattern is developed using a solvent where the dissolution rate of the first film is greater than a dissolution rate of the second film. A waveguiding layer is applied onto a top surface of a suspended membrane such that the layer has an index of refraction greater than an index of refraction of the suspended membrane.
REFERENCES:
patent: 6711200 (2004-03-01), Scherer et al.
“Etchless Fabrication of Slab Photonic Crystals in Silicon”, Janusz Murakowski et al.., CLEO Conference Paper, May 19-25, 2002, Long Beach, California.
“Etchless Fabrication of Phnotonic Crystals in Silicon”, Janusz Murakowski, et al., American Vacuum Society, J. Vac. Sci. Technology Bulletin 20(5), Sep./Oct. 2002.
Murakowski Janusz
Prather Dennis W.
Pustai David
Connolly Bove & Lodge & Hutz LLP
Hume Larry J.
Toledo Fernando L.
University of Delaware
LandOfFree
Etchless fabrication of planar photonic crystal structures... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Etchless fabrication of planar photonic crystal structures..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Etchless fabrication of planar photonic crystal structures... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3769377