Coating processes – Electrical product produced – Condenser or capacitor
Patent
1979-11-28
1981-11-10
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
29571, 427 94, 427 96, 156644, 156650, 156653, 156657, 156662, H01L 2128
Patent
active
042998620
ABSTRACT:
Windows in a glass coating on a semiconductor wafer surface are opened to an underlying semiconductor device region without inadvertently exposing adjacent device portions within the window. In the preferred process a precisely etchable silicon nitride coating is initially applied and windows precisely etched in it. The glass is applied later and preferentially etched, whereby undesired lateral etching of the glass can occur without unintentionally exposing adjacent device portions.
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"ROM Program Process May Beat EPROMS in Turn-Around Time" Electronics, pp. 39-40, May 25, 1978.
General Motors Corporation
Smith John D.
Wallace Robert J.
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